au.\*:("ROWLEY, Steven")
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Monitoring airborne molecular contamination : a quantitative and qualitative comparison of real-time and grab-sampling techniquesSHUPP, Aaron M; RODIER, Dan; ROWLEY, Steven et al.Proceedings of SPIE, the International Society for Optical Engineering. 2007, pp 65183Z.1-65183Z.13, issn 0277-786X, isbn 978-0-8194-6637-2Conference Paper
Can he fix it? Yes, he can!WESTON, Kelly; BUSH, Kate; AFSHAR, Farid et al.BMJ (Overseas and retired doctors ed.). 2010, Vol 341, Num 7786, issn 1759-2151, p. 1289Article
Reducing Capital & Labor Costs of 193nm Lithography Monitoring of Airborne Molecular Contamination (AMC) through Proactive Assessment and Implementation of AMC Monitoring Techniques and StrategiesROWLEY, Steven; YANG, Jerry; WEI, Andy et al.Proceedings of SPIE, the International Society for Optical Engineering. 2008, Vol 7140, issn 0277-786X, isbn 978-0-8194-7381-3 0-8194-7381-2, 71400U.1-71400U.9, 2Conference Paper